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A microwave power beaming system was developed to realize wireless power supply to a Micro Aerial Vehicle. This system consists of transmitting, tracking, and receiving systems. In the transmitting system, a 5.8GHz microwave beam was irradiated from an active phased array antenna. Transmitting power was 4W and the beam divergence angle was 9deg. In the tracking system, a 2.45GHz pilot signal was detected by a two-dimensional tracking antenna and the position was deduced though the software retro-directive function. The maximum tracking error was 1.97deg in the azimuth direction and 1.79deg in the traverse direction. Then, FM/AM wireless camera signal was used the pilot signal for tracking. The maximum error was 3.22deg in the traverse direction and was 4.97deg in azimuth direction that were slightly larger than those without modulation.