Cart (Loading....) | Create Account
Close category search window
 

Robust Design and Performance Verification of an In-Plane XYθ Micropositioning Stage

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Donghyun Hwang ; Dept. of Precision Eng., Univ. of Tokyo, Tokyo, Japan ; Jungwoong Byun ; Jaehwa Jeong ; Lee, M.G.

This paper describes the robust design, fabrication, and performances verification of a novel ultraprecision XYθ micropositioning stage with piezoelectric actuator and flexure mechanism. The main goal of the proposed novel design is to combine a translational motion part and rotational motion part as a decoupled serial kinematics on a same plane. Proposed compound cymbal mechanisms of the translational motion part have functions of motion amplifier as well as motion guide. And Scott-Russell linkage mechanism is applied to the rotational motion part. In this research, Taguchi Design of Experiments is used for robust design with flexure notch hinge fabrication errors as noise factors. Target specifications of the design are sufficient range and bandwidth of motion. The proposed XYθ stage has a translational motion range of 58.0 μm and rotational motion range of 1.05 mrad, and a closed-loop resolution of ±2.5 nm, ±2.5 nm, and ±0.25 μrad in X-, Y-, and θ-directional motion, respectively. The proposed XYθ micropositioning stage has a novelty with in-plane and decoupled kinematic design, compared with many previously developed stages based on planar parallel kinematics.

Published in:

Nanotechnology, IEEE Transactions on  (Volume:10 ,  Issue: 6 )

Date of Publication:

Nov. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.