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Fully CMOS compatible subwavelength plasmonic slot waveguides for Si electronic-photonic integrated circuits

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4 Author(s)
Shiyang Zhu ; Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Liow, T.Y. ; Lo, G.Q. ; Kwong, D.L.

Subwavelength horizontal Al/SiO2/Si/SiO2/Al plasmonic slot waveguides with SiO2 width at each side of ~15 nm and Si width of ~136, ~87, and ~43 nm are fabricated on SOI substrates using fully CMOS compatible processes. The propagation losses at 1550 nm TE are ~1.01, ~1.31, and ~1.56 dB/μm, respectively, as measured by the standard cutback method. A simple taper coupler with length of ~0.3-1 μm provides a high coupling efficiency of ~66%-79% between the plasmonic slot waveguide and the standard Si dielectric waveguide. The plasmonic slot waveguide can achieve a direct 90° bend with a very low bending loss of ~0.2-0.4 dB. The propagation, coupling, and bending losses depend weakly on wavelength in the c-band. The results demonstrate the potential for seamless integration of functional plasmonic devices in existing Si electronic-photonic integrated circuits.

Published in:

Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2011 and the National Fiber Optic Engineers Conference

Date of Conference:

6-10 March 2011

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