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Microwave measurements of effective dielectric constant of semiconductor waveguides via periodic-structure photoexcitation

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1 Author(s)
W. Platte ; Inst. fur Hochfrequenztech. und Optoelektronik, Univ. der Bundeswehr Hamburg, Germany

In this paper a new method for measurements of the effective dielectric constant of layered or full-substrate semiconductor waveguides at microwave frequencies is presented. The light-induced generation of a photoconductivity grating within the excited waveguide section is utilized. Incoming swept-frequency signals produce a stop-band reflection spectrum which exhibits a dominant major-lobe peak value at the grating center frequency. The effective dielectric constant is calculated from a simple analytical expression by substituting the measured center frequency. Theoretical background, error estimation, and an example are presented

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:46 ,  Issue: 3 )