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Low- and high-field electron-transport parameters for unstrained and strained Si/sub 1-x/Ge/sub x/

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7 Author(s)
Bufler, F.M. ; Inst. fur Theoretische Elektrotechnik und Mikroelektronik, Bremen Univ., Germany ; Graf, P. ; Meinerzhagen, B. ; Adeline, B.
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Ohmic minority and majority drift mobilities as well as saturation velocities are reported for unstrained and strained Si/sub 1-x/Ge/sub x/ alloys up to z=0.31. The electron-transport model is verified by measurements of the in-plane majority drift mobility in strained Si/sub 1-x/Ge/sub x/ samples for various dopant and Ge concentrations. Saturation velocities are determined by full-band Monte Carlo simulations. There is no substantial decrease in the mobility perpendicular to the Si/SiGe interface for doping concentrations above 10/sup 19/ cm/sup -3/ and growing x. In contrast, the saturation-drift velocity is strongly reduced with x.

Published in:
Electron Device Letters, IEEE  (Volume:18 ,  Issue: 6 )

Date of Publication: June 1997

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