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Micromechatronics and the miniaturization of structures, devices, and systems

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3 Author(s)
Friedrich, C.R. ; Michigan Technol. Univ., Houghton, MI, USA ; Ji Fang ; Warrington, R.O.

Mechatronics is the integration of electrical and electronic functions with mechanical and related functions. At the microscale, microelectromechanical systems (MEMS) strives to integrate those functions as well. Therefore micromechatronics and MEMS are basically identical in nature. The integration of technologies goes beyond an assemblage of subsystems. A true micromechatronic system addresses all technologies simultaneously at the design stage so manufacturing processes may also be integrated. A family of surface driven electrostatic microactuators is given as an example of these philosophies. Device performance is given and these are compared with other microactuation principles, Additionally, micromechanical machining technologies, which are being used to help reduce the time and cost to develop prototypes, are presented and compared with more traditional lithographic technologies

Published in:

Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on  (Volume:20 ,  Issue: 1 )