Spectral domain analysis of the spiral inductor on multilayer substrates

This paper employed the spectral domain method of moment for the calculation of the current distribution and inductance of the spiral inductor on silicon multilayer structures. We used FFT (fast Fourier transform) in the calculation of the infinite 2-dimensional integrals and "divided FFT" in the case of the very small site analysis model. Using this algorithm, the computation time can be reduced considerably compared with the direct integration. The computed inductance was compared with that measured to show the validation of the formulation.