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Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language

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8 Author(s)
Romanowicz, B. ; Inst. of Microsyst., Swiss Federal Inst. of Technol., Lausanne, Switzerland ; Laudon, Matthew ; Lerch, P. ; Renaud, P.
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The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-ATM, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented

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European Design and Test Conference, 1997. ED&TC 97. Proceedings

Date of Conference:

17-20 Mar 1997