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High-order micromechanical electronic filters

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2 Author(s)
Kun Wang ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Nguyen, C.T.-C.

Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increasingly important on this micro-scale. A balanced, 300 kHz, prototype, three-resonator micromechanical filter is demonstrated with filter Q=590 and stopband rejection greater than 38 dB

Published in:

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Date of Conference:

26-30 Jan 1997