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Browse Journals & Magazines > Electronics Letters ...> Volume:33 Issue:5 Help

Sensitivity enhancement in lateral capacitive accelerometers by structure width optimisation

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1 Author(s)
Ramos, J. ; Centro Nacional de Microelectronica, Seville, Spain

An optimum assignment is found for the distribution of area in surface micromachined lateral capacitive accelerometers between stationary and moving electrodes to improve the S/N ratio of the sensor. Depending on etching hole geometry, the sensitivity can increase by a factor of up to 1.76

Published in:
Electronics Letters  (Volume:33 ,  Issue: 5 )

Date of Publication: 27 Feb 1997

Page(s):
384 - 386
ISSN :
0013-5194
INSPEC Accession Number:
5528867
Digital Object Identifier :
10.1049/el:19970256
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
27 Feb 1997
Sponsored by :
Institution of Engineering and Technology

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