By Topic

Sensitivity enhancement in lateral capacitive accelerometers by structure width optimisation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $33
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
J. Ramos ; Centro Nacional de Microelectronica, Seville, Spain

An optimum assignment is found for the distribution of area in surface micromachined lateral capacitive accelerometers between stationary and moving electrodes to improve the S/N ratio of the sensor. Depending on etching hole geometry, the sensitivity can increase by a factor of up to 1.76

Published in:

Electronics Letters  (Volume:33 ,  Issue: 5 )