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Sensitivity enhancement in lateral capacitive accelerometers by structure width optimisation

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1 Author(s)
Ramos, J. ; Centro Nacional de Microelectronica, Seville, Spain

An optimum assignment is found for the distribution of area in surface micromachined lateral capacitive accelerometers between stationary and moving electrodes to improve the S/N ratio of the sensor. Depending on etching hole geometry, the sensitivity can increase by a factor of up to 1.76

Published in:

Electronics Letters  (Volume:33 ,  Issue: 5 )

Date of Publication:

27 Feb 1997

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