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High accuracy CMOS position-sensitive photodetector (PSD)

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3 Author(s)
Makynen, A. ; Dept. of Electr. Eng., Oulu Univ., Finland ; Ruotsalainen, T. ; Kostamovaara, J.

A high-accuracy position-sensitive photodetector (PSD) for integrated sensor systems is presented. A 2-axis PSD composed of a dense array of vertical phototransistors and two arrays of polysilicon resistors was implemented using standard CMOS technology. Test results show better resolution and linearity as compared to a high-quality conventional PSD

Published in:

Electronics Letters  (Volume:33 ,  Issue: 2 )