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A high-resolution and fast-conversion readout circuit for differential capacitive sensors

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4 Author(s)
Jong-Kwan Woo ; Electrical Engineering and Inter-university Semiconductor Research Center, Seoul National University, 151-744, Korea ; Hyunjoong Lee ; Sungho Ahn ; Suhwan Kim

Our readout integrated circuit (ROIC) for differential capacitive sensors, such as thin-membrane transducer, uses current switching and time-domain based technique to measure the difference between the capacitance of the sensing and reference more rapidly, while maintaining accuracy. The 12-bit ROIC is designed and fabricated in a 0.35μm digital CMOS bulk technology.

Published in:

23rd IEEE International SOC Conference

Date of Conference:

27-29 Sept. 2010