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Silicon based antennas for THz integrated arrays

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7 Author(s)
Llombart, N. ; Opt. Dept, Univ. Complutense de Madrid, Madrid, Spain ; Thomas, B. ; Alonso, M. ; Lee, C.
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A set of antenna geometries for future integrated arrays at terahertz frequencies, based on two fabrication techniques is presented. The first technique consists in an advanced laser micro-fabrication, allowing fabricating advanced 3D geometries but may not be cost-efficient for large arrays. The second one is based in photolithographic processes, allowing the fabrication of arrays on a single wafer in parallel.

Published in:
Antennas and Propagation (EUCAP), Proceedings of the 5th European Conference on

Date of Conference: 11-15 April 2011

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