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A set of antenna geometries for future integrated arrays at terahertz frequencies, based on two fabrication techniques is presented. The first technique consists in an advanced laser micro-fabrication, allowing fabricating advanced 3D geometries but may not be cost-efficient for large arrays. The second one is based in photolithographic processes, allowing the fabrication of arrays on a single wafer in parallel.
Date of Conference: 11-15 April 2011