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An optimized design of a MEMS-based phase shifter cell based on an equivalent circuit model is presented. The optimization is performed by controlling five key design parameters of the unit cell which are: the number of MEMS switches, their state (ON/OFF), their appropriate location inside the slot, their ON/OFF capacitances and whether they should be used singly or in a pair. By controlling and regulating these parameters through the equivalent electrical circuit, the design of the phase shifter cell can be optimized. This optimization process results in phase shifter configurations that permit a 360° phase range along with the required number of linearly distributed phase states. Minimization of power losses within the unit cell is the main issue addressed in this article.
Date of Conference: 11-15 April 2011