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Browse Journals & Magazines > Photonics Technology Letters, ...> Volume:23 Issue:16 Help

Fabrication of Freestanding SiO _{2} -Membrane Systems for Thermo-Optic Adjusting of SOI Photonic Wires

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5 Author(s)
Amthor, J. ; Inst. of Micro Syst. Technol. (E-7), Hamburg Univ. of Technol., Hamburg, Germany ; Horn, Oliver ; Lipka, T. ; Savov, A.
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This work describes the design and fabrication of an electrostatically deflectable SiO2-membrane system with low-loss silicon-on-insulator (SOI) photonic wires. The photonic wires have been tuned thermo-optically and elasto-optically. A 10-mW thermo-optic switch is presented.

Published in:
Photonics Technology Letters, IEEE  (Volume:23 ,  Issue: 16 )

Date of Publication: Aug.15, 2011

Page(s):
1142 - 1144
ISSN :
1041-1135
INSPEC Accession Number:
12175178
Digital Object Identifier :
10.1109/LPT.2011.2157909
Product Type:
Journals & Magazines
Date of Publication :
27 May 2011
Date of Current Version :
21 July 2011
Issue Date :
Aug.15, 2011
Sponsored by :
IEEE Photonics Society

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