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Fabrication of Freestanding SiO _{2} -Membrane Systems for Thermo-Optic Adjusting of SOI Photonic Wires

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5 Author(s)
Amthor, J. ; Inst. of Micro Syst. Technol. (E-7), Hamburg Univ. of Technol., Hamburg, Germany ; Horn, Oliver ; Lipka, T. ; Savov, A.
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This work describes the design and fabrication of an electrostatically deflectable SiO2-membrane system with low-loss silicon-on-insulator (SOI) photonic wires. The photonic wires have been tuned thermo-optically and elasto-optically. A 10-mW thermo-optic switch is presented.

Published in:

Photonics Technology Letters, IEEE  (Volume:23 ,  Issue: 16 )