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An integrated CMOS-compatible Pirani vacuum sensor system has been developed in this paper, which consists of a tungsten microhotplate array with four same microhotplates in series, a constant current circuit, an 8-b A/D converter, and a digital interface. With a tiny amount of the external components, a gas pressure between 10-1 and 105 Pa can be sampled, digitized, and real-time displayed by a LED. It can also be transferred to an external process unit, which makes it suitable for application in a gas pressure control system. The sensor system is implemented in a 0.5-μm CMOS process. When the sensor system works at 5-V voltage and 2.5-MHz clock input, the total power consumption is 350 mW, and the temperature increase of each microhotplate is 35°C.
Published in:
Microelectromechanical Systems, Journal of
(Volume:20
,
Issue:
4
)
Date of Publication: Aug. 2011
- Page(s):
- 834 - 841
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 12205198
- Digital Object Identifier :
- 10.1109/JMEMS.2011.2148157
- Product Type:
- Journals & Magazines
- Date of Publication :
- 27 May 2011
- Date of Current Version :
- 01 August 2011
- Issue Date :
- Aug. 2011
- Sponsored by :
- IEEE Electron Devices Society
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