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Nonlinear model reduction with application to rapid thermal processing

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4 Author(s)
Aling, H. ; Integrated Syst., Sunnyvale, CA, USA ; Kosut, R.L. ; Emami-Naeini, A. ; Ebert, J.L.

The proper orthogonal decomposition, also called snapshot method, is a nonlinear model order reduction method where reduction of the size of the state space is achieved using a singular value decomposition of a matrix of snapshots of the state vector. This method has been shown to work well for a simple lumped physical model of a rapid thermal processing chamber. Although a substantial reduction of the number of states is achieved, some numerical computations still need to be performed in the high-dimensional state which is computationally expensive. In this paper we demonstrate how this can be avoided using aggregation of terms, resulting in a significant model simulation speed improvement

Published in:

Decision and Control, 1996., Proceedings of the 35th IEEE Conference on  (Volume:4 )

Date of Conference:

11-13 Dec 1996

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