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We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).