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Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

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5 Author(s)
Lu, J. ; MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands ; Kovalgin, A.Y. ; van der Werf, Karine H.M. ; Schropp, Ruud E.I.
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We present the monolithic integration of deep-submicrometer complementary metal-oxide-semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).

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Electron Devices, IEEE Transactions on  (Volume:58 ,  Issue: 7 )