$\hbox{Zr}_{x}\hbox{Ti}_{1 - x}\hbox{O}_{2}$ -Based Ultraviolet Detectors Series

In this letter, Zr
_x
Ti
_1-x
O
₂
-based ultraviolet (UV) detector series with Pt electrodes were fabricated. The Zr
_x
Ti
_1-x
O
₂
thin films were prepared by a sol-gel method and characterized by means of X-ray diffraction and UV-visible absorption spectra. At 5 V bias, the dark currents of the detectors were less than 7 nA; under radiation of UV light, a high responsivity rate of 470 A/W was achieved at 270 nm for the Zr
_0.1
Ti
_0.9
O
₂
detector. The results showed that, at low Zr doping, the photoresponse was greatly improved, whereas at high Zr doping, the response peaks shift to the short-wavelength direction, which provides a new platform to fabricate solar-blind UV detectors.