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DC Voltage Reference Based on a Square-Wave-Actuated Microelectromechanical Sensor

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2 Author(s)
Kaasalainen, J. ; Centre for Metrol. & Accreditation (MIKES), Espoo, Finland ; Manninen, A.

Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of ± 2 parts per million during a 22-day measurement period was demonstrated.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:60 ,  Issue: 7 )