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Simulation environment for MEMS sensors and actuators

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2 Author(s)
Kaltenbacher, M. ; Appl. Mechatron., Alps-Adriatic Univ., Klagenfurt, Austria ; Kock, H.

The design of modern sensors, actuators as well as sensor-actuators systems, which are often Micro-Electro-Mechanical Systems (MEMS), strongly depends on the availability of appropriate computer aided engineering (CAE) tools, since the fabrication of each prototype is quite costly. We preset such a CAE tool, which solves the underlying system of partial differential equations (PDEs) by the Finite Element (FE) method. As a practical example we present investigations for a capacitive micromachined ultrasound transducers (CMUTs) as used for ultrasound imaging. Furthermore, we discuss a homogenization approach for the integrated power electronic structures on such a MEMS transducer to allow for a thermal simulation of the whole device.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on

Date of Conference:

18-20 April 2011