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Monte Carlo simulation of X-ray diffraction embedded in experimental determination of residual stresses in microsystems

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2 Author(s)
Zschenderlein, U. ; Dept. of Mater. & Reliability of Microsyst., Chemnitz Univ. of Technol., Chemnitz, Germany ; Wunderle, B.

In this paper a simulation is presented which tracks photons through complex material systems. Besides the usual Compton and Rayleigh scattering that is covered in high energy radiography simulations the presented model considers Bragg-Laue diffraction. The implementation bases on a Monte Carlo code to account for the scattering during radiography. In this paper first results of the simulation are presented. A simple radiation as well as a diffraction experiment was setup. The attenuation coefficient and the position of the diffraction peaks drawn out of the simulation were in good agreement with the literature.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on

Date of Conference:

18-20 April 2011