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Vibration characterization of a MEMS 3D force sensor

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6 Author(s)
Erinc, M. ; TNO, De Rondom 1, 5612 AP Eindhoven, The Netherlands ; van de Wiel, H.J. ; Werkhoven, R.J. ; Pongracz, A.
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MEMS devices and sensors in automotive applications are exposed to vibrations during service life. These vibrations can have a profound effect on the accuracy and reliability of the device. In this study a 3D force sensor, to be used in an automotive tire for the measurement of longitudinal and lateral forces is analysed. The study compromises two parts: First, a numerical analysis is performed to determine Eigen frequencies of the device and a stress strain analysis to determine allowable displacements before the sensor is damaged. Next, Eigen frequencies and mechanical fatigue resistance is evaluated by means of vibration exciter experiments. Additionally, a road test is performed on a test circuit to determine the robustness of the force sensor under actual automotive load conditions while attached to the rims of the wheels.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on

Date of Conference:

18-20 April 2011