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System-level model of electrothermal microsystem with temperature control circuit

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3 Author(s)
Bechtold, T. ; CADFEM GmbH, Leinfelden-Echterdingen, Germany ; Rudnyi, E.B. ; Hohlfeld, D.

In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on

Date of Conference:

18-20 April 2011