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Improved diamond surfaces following lift-off and plasma treatments as observed by x-ray absorption spectroscopy

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9 Author(s)
Stacey, A. ; School of Physics, The University of Melbourne, Victoria 3010, Australia ; Drumm, Virginia S. ; Fairchild, Barbara A. ; Ganesan, Kumar
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We have investigated the nature of the residual damage in diamond crystals following the ion implantation/graphitization “lift-off” process, using near-edge x-ray absorption fine structure spectroscopy and transmission electron microscopy. A defective but crystalline interface is found, which displays dense pre-edge unoccupied states and an almost complete loss of the core-level C 1s exciton signature. This residual crystalline damage is resistant to standard chemical etching, however a hydrogen plasma treatment is found to completely recover a pristine diamond surface. Analysis and removal of residual ion-induced damage is considered crucial to the performance of many diamond device architectures.

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Applied Physics Letters  (Volume:98 ,  Issue: 18 )