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Mechanical analysis and optimization of a microcantilever sensor coated with a solid receptor film

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1 Author(s)
Yoshikawa, Genki ; International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba 305-0044, Japan

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This letter presents an analytical model for the static deflection and optimization of a nanomechanical cantilever sensor coated with a solid receptor film. All relevant physical parameters of both cantilever and coating film are included; Young’s modulus, Poisson’s ratio, and geometrical parameters (length, width, and thickness). This model provides accurate values verified by a good agreement with those simulated by finite element analysis, while the Stoney’s equation [G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909)] and Sader’s model [J. E. Sader, J. Appl. Phys. 89, 2911 (2001)] which assume ideal surface stress without a solid coating film, result in significant deviation under some conditions. Mechanical analysis and optimization based on experimental results are also demonstrated as an example.

Published in:

Applied Physics Letters  (Volume:98 ,  Issue: 17 )