A series of cobalt ferrite (CFO) thin films were grown on SiO2/Si(100) substrates using pulsed-laser deposition (PLD) at substrate temperature (TDEP) of 250 °C and oxygen pressures (PO2) from 0.67 to 6.7 Pa. The influence of PO2 on crystal structure, phase mixture, deposition rate, and magnetic properties was investigated. It is shown in this study that there is a window of PO2 for optimized growth of nanograined CFO films at low TDEP and that either higher or lower values of PO2 produce undesirable multiphase mixtures. CFO films grown at such low substrate temperature and optimized oxygen pressure on thermal expansion matched substrates can be applied in multilayer sensors or MEMS devices.
Published in:
Journal of Applied Physics
(Volume:109
,
Issue:
8
)
Date of Publication:
Apr 2011
- Page(s):
-
083922
-
083922-4
- ISSN :
-
0021-8979
- Digital Object Identifier :
-
10.1063/1.3574918
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
25 April 2011
- Issue Date :
-
Apr 2011