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A simple model for electron capture and emission process in oxide traps is introduced for analysis of random telegraph signal noise. Multiphonon emission capture theory is used for a “more fundamental” thermally activated capture cross-sectional model. Basically, Shockley-Read-Hall statistics is considered for time constant modeling. Particularly, the thermally activation model with the quantum effect is applied to emission time constant modeling. It is shown that the capture and emission process are controlled by characteristics of traps. Especially, the physical meaning of the lattice relaxation energy which is the most important model parameter and the trap characteristic is clarified.