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Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators

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4 Author(s)
Prikhodko, I.P. ; Dept. of Mech. & Aerosp. Eng., Univ. of California, Irvine, CA, USA ; Zotov, S.A. ; Trusov, A.A. ; Shkel, A.M.

This paper introduces a new paradigm for design and batch fabrication of isotropic 3-D spherical shell resonators. The approach uses pressure and surface tension driven plastic deformation (glassblowing) on a wafer scale as a mechanism for creating inherently smooth and symmetric 3-D resonant structures. The feasibility of the new approach was demonstrated by fabrication and characterization of Pyrex glass spherical shell resonators with millimeter-scale diameter and average thickness of 10 μm . Metal electrodes cofabricated along with the shell were used to actuate the two dynamically balanced four- and six-node vibratory modes. For 1-MHz glass-blown resonators, the relative frequency mismatch Δf/f between the two degenerate four-node wineglass modes was measured as 0.63% without any trimming or tuning. For the higher order six-node wineglass modes, the relative frequency mismatch was only 0.2%, demonstrating the potential for precision manufacturing. The intrinsic manufacturing symmetry enabled by the technology may inspire new classes of high-performance 3-D MEMS for communication and inertial navigation.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 3 )