By Topic

Improve fab performance by using a unique system that support overall equipment efficiency methodology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Maya Bakshi ; Micron, Qiryat Gat, Israel ; Tomer Segal ; Sylvain Bouhnik

In advanced semiconductor manufacturing, capital equipment drives the largest cost in producing products. The best way to increase productivity capabilities while using the same existing capacity (number of tools) is by maximizing the tools' utilization or availability and minimizing the running loss. Indeed, sometimes the tools are not fully utilized. So why invest in more expensive capital equipment when you may be able to get the extra capacity benefits that you need by improving equipment performance?

Published in:

Semiconductor Manufacturing (ISSM), 2010 International Symposium on

Date of Conference:

18-20 Oct. 2010