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Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes

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5 Author(s)
Fletcher, P.C. ; Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA ; Bhatia, B.S. ; Yan Wu ; Shannon, M.A.
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This paper reports the integration of both electrical and thermal elements into the free end of an atomic-force microscope cantilever, where the electrode and heater-thermometer are electrically isolated by an NPN semiconductor back-to-back diode. The electrothermal cantilever can be self heated using an integrated solid-state heater to more than 600°C. The tip voltage can be measured or controlled independent of the tip temperature, either in the direct or the alternating current mode. To our knowledge, this setup is the first microcantilever to have a solid-state junction and heater integrated near a scanning probe tip.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 3 )