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Cavity formation in a liquid Sn droplet driven by laser ablation pressure for an extreme ultraviolet light source target

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6 Author(s)
Yuspeh, S. ; Department of Electrical and Computer Engineering and the Center for Energy Research, University of California, San Diego, 9500 Gilman Drive, La Jolla, California 92093-0438, USA ; Ueno, Y. ; Tillack, M.S. ; Burdt, R.
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An in situ approach to the formation of cavities in liquid Sn droplets for the purpose of increasing ion density from Sn plasma produced by a CO2 laser is investigated. Two-dimensional hydrodynamic simulations, treating the laser as a pulsed pressure source, are compared both spatially and temporally to experimental shadowgraphs for verification of cavity formation. It is shown that a 15 ns pulse from a 1.064 μm laser with intensity of 2 × 1010 W/cm2 creates a cavity approximately 300 μm wide and 100 μm deep in approximately 1.4 μs. The presence of the cavity enhances the conversion of laser energy to 13.5 nm radiation from the plasma.

Published in:

Journal of Applied Physics  (Volume:109 ,  Issue: 7 )

Date of Publication:

Apr 2011

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