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Information subsystem of quality assurence technology for IC and MEMS industry

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1 Author(s)
Tkachenko, N. ; Software Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine

The industrial production process is analyzed. Information, what accompanies the general production cycle is analyzed. Identified the structure of the information sub-system for quality indexes monitoring.

Published in:

CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of

Date of Conference:

23-25 Feb. 2011