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This paper proposes a method to measure the ac magnetic field distribution in close proximity to a coplanar waveguide (CPW) employing a cantilever tip fabricated for magnetic force microscopy as a sensor. Almost the entire surface of the tip is coated with a magnetically hard film (Co–Cr–Pt), which is magnetized vertically. Herein we focus on the accuracy of the tip image distribution in close proximity of the ac fields from downsized CPWs which, for example, have a signal line as fine as 5 μm and ground lines of 50 μm. The results suggest that the system has potential as a micron scale RF field detector, although a few technological problems must be solved.