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Cascaded-Ring Optical Sensor With Enhanced Sensitivity by Using Suspended Si-Nanowires

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2 Author(s)
Jing Hu ; Centre for Optical and Electromagnetic Research, State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, P.R. China ; Daoxin Dai

A cascaded-ring optical sensor with Vernier effect is demonstrated experimentally by using Si nanowires. The Vernier effect helps to obtain ultrahigh sensitivity. In order to enhance the sensitivity further, a suspended Si nanowire is used for the sensing ring by removing the SiO2 insulator underneath with a wet-etching process. The measurement result shows that the sensitivity Δλ/Δna of the demonstrated cascaded-ring optical sensor is up to 4.6×105 nm/RIU experimentally. The detection limit for the index change is about 4.8×10-6.

Published in:

IEEE Photonics Technology Letters  (Volume:23 ,  Issue: 13 )