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Design and simulation of a self-assembled MEMS force sensor for Minimally Invasive Surgery

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4 Author(s)
Gutiérrez-Cándano, H. ; Dept. of Electr. & Comput. Eng., Tecnol. de Monterrey (ITESM), Monterrey, Mexico ; Camacho-León, S. ; Dieck-Assad, G. ; Martínez-Chapa, S.O.

This work describes the design and Finite Element Method (FEM) simulation of an integrated force microsensor which introduces a self-assembled tactile structure with potential application to Minimally Invasive Surgery (MIS). The sensor is designed to be compatible with Complementary Metal-Oxide-Semiconductor-Micro-Electro-Mechanical Systems (CMOS-MEMS) technology under monolithic microfabrication processes, and allows force measurements up to the micronewton scale.

Published in:

Sensors Applications Symposium (SAS), 2011 IEEE

Date of Conference:

22-24 Feb. 2011

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