Referenced Items are not available for this document.
Nano-level 3-D measurement is one of the key technologies for the current and next generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, “Wide range nano-level 3-D shape measurement method using combination of RGB laser lights” has been developed. It measures the height of nano-objects from the combination of RGB LED lights combinations. To analyze the combination of RGB lights, the color analysis method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height changes. Experimental system to measure the micro-meter heights using RGB lightings has been developed, and succeeded to measure the 50 nm step and 500 nm step samples.
Published in:
Frontiers of Computer Vision (FCV), 2011 17th Korea-Japan Joint Workshop on
Date of Conference: 9-11 Feb. 2011
- Page(s):
- 1 - 6
- E-ISBN :
- 978-1-61284-676-7
- Print ISBN:
- 978-1-61284-677-4
- INSPEC Accession Number:
- 11904273
- Conference Location :
- Ulsan
- Digital Object Identifier :
- 10.1109/FCV.2011.5739711
- Product Type:
- Conference Publications
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