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Multilayered Monolithic Silicon Photonic Crystals

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6 Author(s)
Basu Mallick, Shrestha ; Dept. of Appl. Phys., Stanford Univ., Stanford, CA, USA ; Il Woong Jung ; Meisner, A.M. ; Provine, J.
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In this letter, we describe the fabrication of double-layered self-aligned silicon photonic crystals (PCs) using directional and isotropic etches. The double-layer PCs represent a step towards practical 3-D PCs based on standard Si processing, and they have several advantageous characteristics compared to single-layer PCs, including higher reflectivity and sharper resonances, as demonstrated both experimentally and by finite-difference time-domain (FDTD) simulations.

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Photonics Technology Letters, IEEE  (Volume:23 ,  Issue: 11 )