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A surface-micromachined tunable microgyroscope

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6 Author(s)
Ki Bang Lee ; Dept. of Mech. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea ; Jun-Bo Yoon ; Myung-Seok Kang ; Young-Ho Cho
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We present a surface-micromachined microgyroscope, whose resonant frequency is electrostatically-tunable after fabrication. The microgyroscope has two oscillation modes: a sensing mode and a actuating mode. In a theoretical study, the microgyroscope has been designed so that the resonant frequency in the sensing mode is higher than that in the actuating mode. A 4-mask surface-micromachining process for the tunable microgyroscope has been described, including the deep RIE of a 6 μm-thick LPCVD polycrystalline silicon structure layer. In a experimental study, the resonant frequency in the sensing mode has been matched to that in actuating mode by applying an inter-plate bias voltage. Frequency matching for the fabricated microgyroscope has been achieved at 5.8 kHz under the bias voltage of 2 V in a reduced pressure of 0.1 torr. For an input angular rate of 50°/sec, an output signal of 20 mV has been measured from the tuned microgyroscope for an AC drive voltage of 2 V with a DC bias voltage of 3 V

Published in:

Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on  (Volume:2 )

Date of Conference:

18-21 Nov 1996