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Fabrication of micro mirror array with vertical spring structure

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4 Author(s)
Jong-Woo Shin ; Sch. of Electr. Eng., Seoul Nat. Univ., South Korea ; Ho-Seong Kim ; Yong-Kweon Kim ; Beorn-Gyu Choi

A 50×50 μm2 aluminum micro mirror array is fabricated using surface micromachining technology. 50×50 micro mirrors are arrayed two dimensionally. The micro mirror plate is supported by a vertical spring structure that is placed underneath the mirror plate. When the mirror plates reflect a light, the micro mirror array can have large effective reflecting area. Fabrication of vertical spring uses only one mask and shadow evaporation process

Published in:

Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on  (Volume:2 )

Date of Conference:

18-21 Nov 1996