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Nano-electromechanical zero-dimensional freestanding nanogap actuator

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7 Author(s)
Jun Hyun Han ; Marquette University, Milwaukee, Wisconsin, USA ; Norimasa Yoshimizu ; Tiffany Cheng ; Michael Ziwisky
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Micromachined free standing nanogap with metal electrodes is presented. The gap size is as small as 17 nm, and can be reduced further with electrostatic or piezoelectric actuation. The nanoscale gap is fabricated by industrial standard optical lithography and anisotropic wet chemical Si etching. Electron transport between the metal electrodes with optical stimulus enhancing photon-electron coupling (plasmon) is presented.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011