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Magnetostatic torsional actuator with embedded nickel structures for pure rotation

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3 Author(s)
Tsung-Lin Tang ; Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan ; Rongshun Chen ; Weileun Fang

This study demonstrates the magnetostatic torsional actuator consisting of a Si-Ni compound frame to significantly improve the driving force. The present design has three merits: (1) employ Si mold to simultaneously electroplate/pattern thick Ni, and the Ni and Si structures respectively provide magnetostatic force and superior mechanical properties, (2) the embedded Ni structures not only increase the ferromagnetic material volume but also enhance magnetization strength to enlarge magnetostatic torque, (3) the Si-Ni compound structure, which is nearly symmetric about the torsional axis, can decrease the moment of inertia and also reduce the wobble motion. Experiments show the Si-Ni compound scanner has optical scan angle θ=90°, and wobble motion and power consumption is significantly reduced.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011