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Multi-electrode styles with novel sidewall electrode on glass microprobe implemented by Si-via structure

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3 Author(s)
Yu-Tao Lee ; Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Yen-Chung Chang ; Weileun Fang

This study exploits the glass reflowing technique to embed the low resistance silicon-via into glass-based microprobe shaft as electrodes. Thus four different types of electrodes could be fabricated, distributed, and integrated on glass shaft providing the flexibility for different applications. In-vitro and in-vivo (using crayfish) experiments are performed to characterize signals recorded by different electrodes. Signals recorded by the top-side electrode and back-side electrode are substantially different when neuron locates at the top side and back side of probe shaft. Signals recorded by double-side electrode and sidewall electrode are less sensitive to the location of neuron. Moreover, the ability of sidewall electrode to detect neurons at the sidewall, top side, and back side of probe shaft is also demonstrated.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011