By Topic

Ss-DNA functionalized array of ALN Contour-Mode NEMS Resonant Sensors with single CMOS multiplexed oscillator for sub-ppb detection of volatile organic chemicals

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Rinaldi, M. ; Univ. of Pennsylvania, Philadelphia, PA, USA ; Zuniga, C. ; Piazza, G.

This paper reports on the design and experimental verification of the first prototype of a resonant sensing platform based on nanoscaled aluminum nitride Contour-Mode Resonant Sensors (CMR-S) for selective detection of sub-ppb levels of volatile organic chemicals (VOCs). For the first time arrays of 8 nano-CMR-S were fabricated on the same chip and functionalized with two different thiol-terminated ss-DNA sequences. A low noise and low power (as low as 224 μW) CMOS circuit read-out capable of monitoring the responses of each NEMS sensor in a time-multiplexed mode was used. A ss-DNA sequence dependant adsorption of two vapors, such as DNT and DMMP, was recorded. Concentrations of DMMP and DNT as low as 700 part per billion (ppb) and 700 part per trillion (ppt), respectively, were experimentally detected. A limit of detection to mass per unit area as low as ~60 zg/μm2 was extracted by noise characterization of the sensor array.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011