By Topic

Reduced viscous damping in high frequency Piezoelectric Resonant Nanochannels for sensing in fluids

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Zuniga, C. ; Univ. of Pennsylvania, Philadelphia, PA, USA ; Rinaldi, M. ; Piazza, G.

This work reports on the demonstration of a new class of high frequency piezoelectric aluminum nitride resonant sensors, dubbed Piezoelectric Resonant Nanochannels (PRNs), for operation in liquid environment with reduced viscous damping. A novel process consisting of 7 lithographic steps was developed to fabricate the PRNs of this work. The new resonant devices operating at high frequencies (278 and 458 MHz) show an unchanged value of the electromechanical coupling, kt2 (about 0.7 and 0.8%), whether the channel is filled with air or a liquid. A quality factor in fluid, Qf, as high as 464 and 340 is recorded when the 278 MHz PRN is filled with DI-water and 25% glycerol solution, respectively.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011