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Silicon carbide lateral overtone bulk acoustic resonator with ultrahigh quality factor

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5 Author(s)
Ziaei-Moayyed, M. ; Sandia Nat. Labs., Albuquerque, NM, USA ; Habermehl, S.D. ; Branch, D.W. ; Clews, P.J.
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This work demonstrates a lateral overtone bulk acoustic resonator (LOBAR), which consists of an aluminum nitride (AlN) transducer coupled to a suspended thin silicon carbide (SiC) film fabricated using standard CMOS-compatible processes. The LOBAR design allows for high transduction efficiency and quality factors, by decoupling the transduction and energy storage schemes in the resonator. The frequency and bandwidth of the resonator were lithographically defined and controlled. A LOBAR operating at 2.93GHz with a Q greater than 100,000 in air was fabricated and characterized, having the highest reported f×Q product of any acoustic resonator to date.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011

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