By Topic

Parallel array of noise-activated nonlinear micro-resonators with integrated actuators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Yusuke Yoshida ; Graduate School of Engineering, Tohoku University, Japan ; Yusuke Kawai ; Takahito Ono

This paper reports a robust sensing method using nonlinear micromechanical resonators for applications such as resonant mass and thermal radiation sensors. Resonators show stochastic response by applying noise, in which resonators show two vibration states, i.e. large vibration amplitude state and small vibration amplitude state. Single resonator acts as a bistable element, and from responses of the parallel array, the response can be averaged and the total noise can be decreased. We have designed and fabricated such piezoelectric resonator array with ability of self-sensing and self-actuation, and demonstrated noise-activated detection of heat from light. This kind of noise-activated system can be highly robust against external noise and have potential applications to various sensors operated in noisy conditions.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011