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This paper demonstrates an acoustic sensor that can resolve atomic force microscopy (AFM) tip blunting with a frequency sensitivity of 0.007%. The AFM tip is fabricated on a thin film piezoelectric aluminum nitride (AlN) membrane that is excited as a film bulk acoustic resonator (FBAR). We demonstrate that cutting 0.98 μm off of the tip apex results in a resonance frequency change of 0.4MHz at 6.387GHz. This work demonstrates the potential for in-situ monitoring of AFM tip wear.
Published in:
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Date of Conference: 23-27 Jan. 2011
- Page(s):
- 521 - 524
- ISSN :
- 1084-6999
- Print ISBN:
- 978-1-4244-9632-7
- INSPEC Accession Number:
- 11875212
- Conference Location :
- Cancun
- Digital Object Identifier :
- 10.1109/MEMSYS.2011.5734476
- Product Type:
- Conference Publications
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