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Quality factor improvement of silicon nitride micro string resonators

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3 Author(s)
Schmid, S. ; Dept. of Micro- & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark ; Malm, B. ; Boisen, A.

Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor values in air were measured for the shortest strings with the highest resonant frequency having an optimal width to height ratio.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011